KrF (248nm)
GKR series are positive tone KrF photoresist systems that cover a wide range of applications.
- Non PFOS/PFAS materials
- High aspect ratio application
- Superior resistance to plasma etching & ion implantation
- High thermal stability
- Wide process windows
- Low defect levels
- Long term stability
- Vertical profiles
- Wide thickness coverage
GKR series
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- Endoscopy
- Biologics Contract Manufacturing
- Data Storage
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- Industrial Inkjet Printheads
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- Motion Picture Film
- Optical Devices
- Photofinishing Products
- Printing Imaging Colorants
- Professional Photography
- Professional Video
- Semiconductor Materials
- Specialty Chemicals
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