Si-MEMS combines the features and precision of Silicon MicroElectroMechanical Systems (MEMS) with drop-on-demand piezoelectric micro-fluidic pumping in a single monolithic structure with sub-micron accuracy.
The use of this technology enables significant gains in performance and reliability as well as a range of new attributes including higher nozzle density, compact footprint, and light- weight design.
More precise control over nozzle shape and absolute position permits high drop placement accuracy. The silicon construction lends itself to solid reliable operation and long service life.